1/6/2012	11:14:53 AM	Helium valve closed
1/6/2012	11:14:53 AM	H2 valve closed
1/6/2012	11:14:53 AM	BCl3 valve closed
1/6/2012	11:14:53 AM	PH3 valve closed
1/6/2012	11:14:53 AM	SiCl4 pre valve closed
1/6/2012	11:14:53 AM	SiCl4 post valve closed
1/6/2012	11:14:53 AM	Main Vac valve closed
1/6/2012	11:14:53 AM	Bubbler valve closed
1/6/2012	11:14:53 AM	Bypass valve closed
1/6/2012	11:14:53 AM	Helium MFC set to  0.000000
1/6/2012	11:14:53 AM	H2 MFC set to  0.000000
1/6/2012	11:14:53 AM	BCl3 MFC set to  0.000000
1/6/2012	11:14:53 AM	PHl3 MFC set to  0.000000
1/6/2012	11:14:53 AM	SiCl4 MFC set to  0.000000
1/6/2012	11:14:53 AM	Bypass solenoid MFC set to  760.000000
1/6/2012	11:14:53 AM	Tube furnace set to 0
1/6/2012	11:14:53 AM	Baratron reads 1062.879148 Torr.  Emergency exit.
1/6/2012	11:15:00 AM	Program exited cleanly
1/6/2012	11:15:01 AM	Helium valve closed
1/6/2012	11:15:01 AM	H2 valve closed
1/6/2012	11:15:01 AM	BCl3 valve closed
1/6/2012	11:15:01 AM	PH3 valve closed
1/6/2012	11:15:01 AM	SiCl4 pre valve closed
1/6/2012	11:15:01 AM	SiCl4 post valve closed
1/6/2012	11:15:01 AM	Main Vac valve closed
1/6/2012	11:15:01 AM	Bypass valve closed
1/6/2012	11:15:01 AM	Bubbler valve closed
1/6/2012	11:15:01 AM	Helium MFC set to  0.000000
1/6/2012	11:15:01 AM	H2 MFC set to  0.000000
1/6/2012	11:15:01 AM	BCl3 MFC set to  0.000000
1/6/2012	11:15:01 AM	PHl3 MFC set to  0.000000
1/6/2012	11:15:01 AM	SiCl4 MFC set to  0.000000
1/6/2012	11:15:01 AM	Bypass solenoid MFC set to  760.000000
1/6/2012	11:15:01 AM	Tube furnace set to 0
1/6/2012	11:15:03 AM	Main Vac valve opened
1/6/2012	11:15:10 AM	PH3 valve opened
1/6/2012	11:15:15 AM	PHl3 MFC set to  20.000000
1/6/2012	11:33:12 AM	PH3 valve closed
1/6/2012	11:33:14 AM	PH3 valve opened
1/6/2012	11:33:16 AM	PH3 valve closed
1/6/2012	11:33:16 AM	PH3 valve opened
1/6/2012	11:33:19 AM	Main Vac valve closed
1/6/2012	11:33:24 AM	Helium MFC set to  50.000000
1/6/2012	11:33:26 AM	PH3 valve closed
1/6/2012	11:33:30 AM	Helium MFC set to  500.000000
1/6/2012	11:33:31 AM	Helium valve opened
1/6/2012	11:33:47 AM	PH3 valve opened
1/6/2012	11:34:46 AM	Helium valve closed
1/6/2012	11:35:25 AM	PH3 valve closed
1/6/2012	11:35:29 AM	PHl3 MFC set to  0.000000
1/6/2012	12:48:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2012	12:48:34 PM	Recipe started at 12:48 PM
1/6/2012	12:48:34 PM	Helium valve closed
1/6/2012	12:48:34 PM	H2 valve closed
1/6/2012	12:48:34 PM	BCl3 valve closed
1/6/2012	12:48:34 PM	PH3 valve closed
1/6/2012	12:48:34 PM	SiCl4 pre valve closed
1/6/2012	12:48:34 PM	SiCl4 post valve closed
1/6/2012	12:48:34 PM	Main Vac valve closed
1/6/2012	12:48:34 PM	Bubbler valve closed
1/6/2012	12:48:34 PM	Bypass valve opened
1/6/2012	12:48:34 PM	Helium MFC set to  0.000000
1/6/2012	12:48:34 PM	H2 MFC set to  0.000000
1/6/2012	12:48:34 PM	BCl3 MFC set to  0.000000
1/6/2012	12:48:34 PM	PHl3 MFC set to  0.000000
1/6/2012	12:48:34 PM	SiCl4 MFC set to  0.000000
1/6/2012	12:48:34 PM	Bypass solenoid MFC set to  0.000000
1/6/2012	12:48:34 PM	Tube furnace set to 0
1/6/2012	12:50:21 PM	Helium valve closed
1/6/2012	12:50:21 PM	H2 valve closed
1/6/2012	12:50:21 PM	BCl3 valve closed
1/6/2012	12:50:21 PM	PH3 valve closed
1/6/2012	12:50:21 PM	SiCl4 pre valve closed
1/6/2012	12:50:21 PM	SiCl4 post valve closed
1/6/2012	12:50:21 PM	Main Vac valve closed
1/6/2012	12:50:21 PM	Bubbler valve closed
1/6/2012	12:50:21 PM	Bypass valve opened
1/6/2012	12:50:21 PM	Helium MFC set to  0.000000
1/6/2012	12:50:21 PM	H2 MFC set to  0.000000
1/6/2012	12:50:21 PM	BCl3 MFC set to  0.000000
1/6/2012	12:50:21 PM	PHl3 MFC set to  0.000000
1/6/2012	12:50:21 PM	SiCl4 MFC set to  0.000000
1/6/2012	12:50:21 PM	Bypass solenoid MFC set to  0.000000
1/6/2012	12:50:21 PM	Tube furnace set to 0
1/6/2012	12:50:22 PM	Helium valve closed
1/6/2012	12:50:22 PM	H2 valve closed
1/6/2012	12:50:22 PM	BCl3 valve closed
1/6/2012	12:50:22 PM	PH3 valve closed
1/6/2012	12:50:22 PM	SiCl4 pre valve closed
1/6/2012	12:50:22 PM	SiCl4 post valve closed
1/6/2012	12:50:22 PM	Bypass valve closed
1/6/2012	12:50:22 PM	Bubbler valve closed
1/6/2012	12:50:22 PM	Main Vac valve opened
1/6/2012	12:50:22 PM	Helium MFC set to  0.000000
1/6/2012	12:50:22 PM	H2 MFC set to  0.000000
1/6/2012	12:50:22 PM	BCl3 MFC set to  0.000000
1/6/2012	12:50:22 PM	PHl3 MFC set to  0.000000
1/6/2012	12:50:22 PM	SiCl4 MFC set to  0.000000
1/6/2012	12:50:22 PM	Bypass solenoid MFC set to  0.000000
1/6/2012	12:50:22 PM	Tube furnace set to 0
1/6/2012	12:50:23 PM	Run finished at 12:50 PM
1/6/2012	12:50:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2012	6:23:19 PM	Main Vac valve closed
1/6/2012	6:23:21 PM	PH3 valve opened
1/6/2012	6:23:25 PM	Bypass valve opened
1/6/2012	6:26:20 PM	PHl3 MFC set to  20.000000
1/6/2012	6:27:58 PM	Bypass valve closed
1/6/2012	6:27:59 PM	Main Vac valve opened
